Kochergin V. Porous semiconductors: optical properties and applications (London, 2009). - ОГЛАВЛЕНИЕ / CONTENTS
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ОбложкаKochergin V. Porous semiconductors: optical properties and applications / V.Kochergin, H.Föll. - London: Springer, 2009. - ix, 206 p.: ill. - (Engineering materials and processes). - Incl. bibl. ref. - Ind.: p.207. - ISBN 978-1-84882-577-2; ISSN 1619-0181
 

Оглавление / Contents
 
1  Introduction ................................................. 1
   1.1  Pores in Silicon and Optics ............................. 1
   1.2  Organization of this Book ............................... 3
   1.3  References .............................................. 
2  Pore Etching Essentials ...................................... 7
   2.1  Scope of this Chapter ................................... 7
   2.2  Some Basics and Definitions ............................. 8
        2.2.1  The Essentials ................................... 8
        2.2.2  Basic Current-Voltage Characteristics ........... 10
   2.3  Dissolution Mechanisms and Pore Formation .............. 13
        2.3.1  Basics .......................................... 13
        2.3.2  Direct Dissolution .............................. 16
        2.3.3  Dissolution by Anodic Oxidation ................. 18
        2.3.4  Pore Formation .................................. 19
   2.4  A First Approach to Pores in Semiconductors ............ 20
        2.4.1  Basics .......................................... 20
        2.4.2  Parameter Space for Pore Etching Experiments .... 21
   2.5  The Etching of Deep Macropores in Lightly Doped 
        n-Type Si Under Backside Illumination .................. 26
   2.6  In-Situ Monitoring of Pore Growth ...................... 29
        2.6.1  Motivation and Experimental Approach ............ 29
        2.6.2  Examples for Multi-Mode In-Situ FFT Impedance 
               Measurements .................................... 35
   2.7  Beyond the SCR Model ................................... 38
        2.7.1  The Limits of the SCR Model ..................... 38
        2.7.2  Enlarging the Parameter Space for Etching
               Macropores ...................................... 43
        2.7.3  The Current Burst Model ......................... 48
   2.8  Micropores, Mesopores and Special Macropores ........... 52
        2.8.1  Micropores and p-Macro(aqu) Pores ............... 52
        2.8.2  Mesopores ....................................... 54
   2.9  Macropores in Lightly Doped p-Type Silicon ............. 54
        2.9.1  The Basics ...................................... 54
        2.9.2  Some Specifics .................................. 55
   2.10 Summary and Conclusion ................................. 59
   2.11 References ............................................. 59
3  Subwavelength Approach of Light Propagation Through Porous
   Semiconductors .............................................. 63
   3.1  Introduction ........................................... 63
   3.2  Isotropic Effective Medium Models ...................... 63
   3.3  Anisotropic Effective Medium Models .................... 65
        3.3.1  Effective Permittivity Tensor Calculations ...... 66
        3.3.2  Effective Permittivity of Mesoporous Silicon 
               Etched on (110)-Oriented Wafers ................. 70
        3.3.3  (100)-Oriented III-V Compound Semiconductors
               Containing Crystallographic Pores ............... 74
        3.3.4  Surface Plasmon Enhancement of an Optical
               Anisotropy in Porous Silicon/Metal Composites ... 78
   3.4  Conclusions ............................................ 86
   3.5  References ............................................. 87
4  Leaky Waveguide Approach of Light Propagation Through 
   Porous Semiconductors ....................................... 91
   4.1  Introduction ........................................... 91
   4.2  Leaky Waveguides ....................................... 91
   4.3  Leaky Waveguide Transmission Through MPSi Array ........ 93
   4.4  Conclusions ............................................ 99
   4.5  References ............................................. 99
5  Normal Waveguide Approach of Light Propagation Through 
   Porous Semiconductors ...................................... 101
   5.1  Introduction .......................................... 101
   5.2  Dielectric Waveguides ................................. 101
   5.3  Waveguide Transmission Through MPSi Array ............. 104
   5.4  Conclusions ........................................... 115
   5.5  References ............................................ 116
6  Optical Components from Mesoporous Silicon ................. 117
   6.1  Introduction .......................................... 117
   6.2  Interference Optical Filters .......................... 118
        6.2.1  Antireflection Coatings ........................ 118
        6.2.2  Multilayer Dielectric Reflectors ............... 121
        6.2.3  Bandpass Filters ............................... 124
   6.3  Environmental Instability Problem ..................... 131
   6.4  Substrate Absorption Problem .......................... 135
   6.5  Conclusions ........................................... 137
   6.6  References ............................................ 137
7  Long Wave Pass Filters ..................................... 141
   7.1  Introduction .......................................... 141
   7.2  Common Types of Long Wave Pass Filters ................ 141
   7.3  Long Wave Pass Filters Made of Macroporous Silicon .... 143
   7.4  Conclusions ........................................... 149
   7.5  References ............................................ 149
8  Macroporous Silicon Ultraviolet Filters .................... 151
   8.1  Introduction .......................................... 151
   8.2  Theoretical Considerations ............................ 152
        8.2.1  Single-Layer Coatings on MPSi Pore Walls ....... 153
        8.2.2  Multilayer Coatings on MPSi Pore Walls ......... 155
        8.2.3  Wide Field-of-View Design of MPSi UV Filters ... 163
   8.3  Fabrication and Results ............................... 165
   8.4  Optical Testing ....................................... 169
   8.5  Conclusions ........................................... 170
   8.6  References ............................................ 172
9  Polarization Components for the UV Range ................... 173
   9.1  Introduction .......................................... 173
   9.2  Theoretical Considerations ............................ 174
   9.3  Experimental Results .................................. 176
   9.4  Conclusions ........................................... 178
   9.5  References ............................................ 180
10 Retroreflection Suppression Plate .......................... 181
   10.1 Introduction .......................................... 181
   10.2 Prinicple of Operation ................................ 182
   10.3 Experimental Demonstration ............................ 185
   10.4 Conclusions ........................................... 186
   10.5 References ............................................ 187
11 Omnidirectional IR Filters ................................. 189
   11.1 Introduction .......................................... 189
   11.2 Theoretical Considerations ............................ 189
   11.3 Fabrication ........................................... 193
   11.4 Conclusions ........................................... 196
   11.5 References ............................................ 196
12 Biochemical Sensors Based on Porous Silicon ................ 197
   12.1 Introduction .......................................... 197
   12.2 Functionalization of Porous Silicon ................... 197
   12.3 Porous Silicon Sensors Based on Luminescence
        Quenching ............................................. 198
   12.4 Porous Silicon Sensors Based on Change of Refractive
        Index ................................................. 199
   12.5 Conclusions ........................................... 201
   12.6 References ............................................ 202

Index ......................................................... 207


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