Shimizu K. New horizons of applied scanning electron microscopy / K.Shimizu, T.Mitani. - Berlin; Heidelberg: Springer, 2010. - xiv, 179 p.: ill. - (Springer series in surface sciences; 45). - Ref.: p.173-174. - Ind.: p.177-179. - ISBN 978-3-642-03159-5; ISSN 0931-5195  Место хранения:   091 | Филиал Института физики полупроводников CO РАН | Oмск

Оглавление / Contents

Introduction ................................................... 1 Application Example 1: Lateral Resolution of in-Lens SE and High-Angle BSE Imaging at Low Accelerating Voltages, Below 2.0 kV ................................................... 3 Application Example 2: Z-Contrast Sensitivity in Low-Voltage, High-Angle BSE Imaging ......................................... 7 Application Example 3: Information Depth in Low-Voltage, High-Angle BSE Imaging ........................................ 11 Application Example 4: Nano Inclusions in Co-Hardened Gold Plating for Electronic Applications — Further Evidence for High Lateral Resolution in Low-Voltage, High-Angle BSE Imaging ....................................................... 13 Application Example 5: A Thin Layer of Organic Contaminant on the Surface of Mirror-Polished Al-Based Hard Disks ......... 17 Application Example 6: A Further Potential of Ultralow- Voltage In-lens SE Imaging .................................... 21 Application Example 7: Sample Surface Preparation by Ultramicrotomy Using a Diamond Knife for Cross-Sectional Examination of Various Coatings on Metals ..................... 23 Application Example 8: Cross-Sectional Examination of a Galvanized Steel ......................................... 25 Application Example 9: Cross-Sectional Examination of a Painted Steel ................................................. 29 Application Example 10: Cross-Sectional Examination of Solder Joint of the Printed Circuit Board ..................... 31 Application Example 11: Cross-Sectional Examination of a Tin-Plated Copper Sheet for Electronic Application ............ 33 Application Example 12: Cross-Sectional Examination of an Anodized Aluminum Alloy for Aerospace Application ............. 37 Application Example 13: Cross-Sectional Examination of a Porous Anodic Oxide Film Grown on a Heterogeneous Al-Fe Alloy ......................................................... 39 Application Example 14: Corrosion of an AI 2024-T3 Alloy for Aerospace Application ..................................... 41 Application Example 15: Cross-Sectional Examination of an Etched Al Foil for Capacitor Application ...................... 45 Application Example 16: On the Nature of rf-GD Sputtering ..... 49 Application Example 17: On the Surface Damages Associated with rf-GD Sputtering ......................................... 53 Application Example 18: Precipitates in a Stainless Steel ..... 57 Application Example 19: Ferrite Precipitates in a Low-Carbon Stainless Steel ............................................... 61 Application Example 20: A Novel Use of rf-GD Sputtered Surfaces for Oxidation Study of Iron, Nickel, and Copper ...... 65 1 Oxidation of Iron ....................................... 55 2 Oxidation of Nickel and Copper .......................... 70 Application Example 21: Preparation of "Highly Flat and Damage-Free" Surfaces for High-Resolution Channeling BSE Imaging ....................................................... 79 Application Example 22: Oxidation of Sputtered Metal Surface in Air - The Main Cause of Surface Alternation ........ 91 Application Example 23: Microstructure of a Ti Alloy .......... 97 Application Example 24: Microstructure of a Ni-Based Super Alloy for Aerospace Applications .............................. 99 Application Example 25: Cracks in a Nitrogen-Doped Stainless Steel .............................................. 101 Application Example 26: Sample Surface Preparation Using rf-GD Sputtering for Cross-Sectional Examination ............. 105 Application Example 27: Cross-Sectional Examination of a Galvanized Steel for Car Bodies .............................. 109 Application Example 28: Cross-Sectional Examination of a Flash Memory Device .......................................... 115 Application Example 29: Cross-Sectional Examination of a Multilayered Glass ........................................... 123 Application Example 30: Cross-Sectional Examination of a Copper Sheet for Electronic Application ...................... 125 Application Example 31: Cross-Sectional Examination of a Nitrided Carbon Steel ........................................ 127 Application Example 32: Cross-Sectional Examination of Deformed Surface Regions of Carbon Steel after Shot Peening ...................................................... 131 Application Example 33: Cross-Sectional Examination of a Thermal-Sprayed WC-18% Co Coating on a Titanium Alloy ........................................................ 135 Application Example 34: Cross-Sectional Examination of a Thermal Barrier Coating on the Ni-based Super Alloy for Aerospace Applications ....................................... 141 Application Example 35: Is EDX Elemental Mapping Really Necessary? ................................................... 145 Application Example 36: Titanium Carbide Precipitates in a Duplex Stainless Steel ....................................... 153 Application Example 37: Adhesion Between the Hard Chromium Coating and Copper Substrate ........................ 157 Application Example 38: On the Possibility of the Use of rf-GD Sputtering for Follow-Up Treatment of Thin Slices for ТЕМ Examination .............................................. 161 Application Example 39: On 3D Imaging of Semiconductor Devices by FE-SEM ............................................ 103 Concluding Remarks ........................................... 167 References ................................................... 173 About the Authors ............................................ 175 Index ........................................................ 177