List of Tables ................................................. ix
Preface ........................................................ xi
Abbreviations and Acronyms ................................... xiii
1 Introduction ................................................. 1
2 Miniaturized Solid-State Gas Sensors ......................... 7
2.1 Gas Chromatography-Mass Spectrometry .................... 7
2.2 Fourier Transform Infrared Spectrometer ................. 7
2.3 Miniaturized Solid-State Gas Sensors .................... 8
3 Gas-Sensing Materials and Devices ........................... 11
4 Metal-Oxide-Based Gas-Sensor Devices ........................ 13
4.1 Techniques Used for Gas Sensing ........................ 15
4.1.1 Resistance Variations ........................... 19
4.1.2 Capacitance Variations .......................... 21
4.1.3 Electrochemical Techniques ...................... 21
4.2 Sensor Properties ...................................... 22
4.2.1 Sensitivity of Gas Sensors ...................... 22
4.2.2 Concentration-Dependent Sensitivity ............. 23
4.2.3 Temperature-Dependent Sensitivity ............... 23
4.2.4 Response and Recovery Times ..................... 26
5 Advantages of Nanomaterials ................................. 27
6 Synthesis and Characterization of Nanometal Oxides .......... 39
7 Nanostructured Metal Oxides and Gas-Sensing Devices ......... 41
7.1 Aluminum Oxides ........................................ 42
7.2 Bismuth Oxides ......................................... 46
7.3 Cadmium Oxides ......................................... 48
7.4 Cerium Oxides .......................................... 52
7.5 Cobalt Oxides .......................................... 55
7.6 Copper Oxides .......................................... 60
7.7 Gallium Oxides ......................................... 67
7.8 Indium Oxides .......................................... 73
7.9 Iridium Oxides ......................................... 86
7.10 Iron Oxides ............................................ 86
7.11 Molybdenum Oxides ...................................... 91
7.12 Nickel Oxides .......................................... 94
7.13 Niobium Oxides ......................................... 97
7.14 Tellurium Oxides ....................................... 98
7.15 Tin Oxides ............................................ 100
7.16 Titanium Oxides ....................................... 121
7.17 Tungsten Oxides ....................................... 133
7.18 Vanadium Oxides ....................................... 153
7.19 Zinc Oxides ........................................... 153
7.20 Zirconium Oxides ...................................... 178
7.21 Mixed Oxides .......................................... 179
8 Active Devices Based on Nanostructures ..................... 191
8.1 Diodes and Schottky Diodes ............................ 191
8.2 Field-Effect Transistors .............................. 193
8.3 FET-Based Gas Sensors ................................. 193
9 Future Devices and Nanostructured Gas-Sensor Arrays ........ 205
9.1 Future Devices and Gas-Sensor Arrays .................. 205
9.2 Summary and Conclusions ............................... 207
Appendix: Tables .............................................. 209
References .................................................... 291
Index ......................................................... 309
|