Microelectronics to nanoelectronics: materials, devices & manufacturability / ed. by A.B.Kaul. - Boca Raton: CRC Press, 2013. - xxiii, 407 p., [32] p. of plates: ill. - Incl. bibl. ref. - Ind.: p.387-407. - ISBN 978-1-4665-0954-2  Место хранения:   026 | Институт физики полупроводников СО РАН | Новосибирск | Библиотека

Оглавление / Contents

About the Cover ................................................ ix Foreword ....................................................... xi Preface ...................................................... xiii Acknowledgments .............................................. xvii Editor ........................................................ xix Contributors .................................................. xxi 1 Moore's Law: Technology Scaling and Reliability Challenges ... 1 Tanya Nigam, Kok-Yong Yiang, and Amit Marathe 2 Scaling and Radiation Effects in Silicon Transistors ........ 29 Allan H. Johnston and Leif Z. Scheick 3 Hewlett-Packard's MEMS Technology: Thermal Inkjet Printing and Beyond .................................................. 61 James Stasiak, Susan Richards, and Paul Benning 4 Silicon MEMS Resonators for Timing Applications ............. 79 Bongsang Kim, Matthew A., Hopcroft, and Rob N. Candler 5 Nanoscale Electromechanical Devices Enabled by Nanowire Structures ................................................. 109 Philip X.-L. Feng 6 Silicon Etching and Etch Techniques for NEMs and MEMs ...... 129 M. David Henry and Axel Scherer 7 Learning from Biology: Viral-Templated Materials and Devices .................................................... 157 Elaine D. Haberer 8 Principles and Methods for Integration of Carbon Nanotubes in Miniaturized Systems .......................... 179 A. John Hart, Sei Jin Park, Michael F.L. de Voider, Sameh H. Tawfick, and Eric R. Meshot 9 Heterogeneous Integration of Carbon Nanotubes on Complementary Metal Oxide Semiconductor Circuitry and Sensing Applications ....................................... 219 Chia-Ling Chen, Sameer Sonkusale, Michelle Chen, and Mehmet R. Dokmeci 10 NEMS-Based Ultra Energy-Efficient Digital ICs: Materials, Device Architectures, Logic Implementation, and Manufacturability .......................................... 245 Homed F. Dadgour and Kaustav Banerjee 11 Carbon Nanotube Y-Junctions ................................ 277 Prabhakar R. Bandaru 12 Nanoscale Effects in Multiphase Flows and Heat Transfer .... 309 Navdeep Singh, Donghyun Shin, and Debjyoti Banerjee 13 Nanoengineered Material Applications in Electronics, Biology, and Energy Harnessing ............................. 349 Daniel S. Choi, Zhikan Zhang, and Naresh Pachauri Index ......................................................... 387